Plasma-Therm Dry Etching Workshop University of Alberta, The NanoFab
Plasma-Therm, a leading manufacturer of plasma based etching and deposition equipment, is providing a workshop focusing on the fundamentals of plasma etching. Lectures will include basics of plasma etching mechanisms with relevant examples relating to compound semiconductor, dielectric, metal, and deep silicon etching. State-of-the-art etching technologies for deep silicon will be reviewed. Fundamental and new ideas for endpoint detection and sample thermal budget management will be presented.
When October 1, 2013
Where Talylor Meeting RM 1-010 National Institute for Nanotechnology University of Alberta Edmonton, AB